micro structured photo sensitive glass

Glass Materials

Invenios combines the innovative knowledge of the fast-growing field of microtechnology with the experience of the traditional glass technology. Glass offers a large variety of possibilities. Due to its outstanding properties glass plays an important role in microtechnology. Invenios offers not only components and complete system solutions, but also various special glass in standard and individual sizes.

  • PSG: Photo structurable glass
  • Borofloat, Pyrex: silicon bondable glass
  • B270: colourless, high-transmission crown glass
  • AF45, D263: borosilicate glass, thin glass

We also provide other glass on request

Wafers (with or without flat available):

  • standard sizes: 3″ / 75 mm; 4″ / 100 mm; 5″ / 125 mm; 6″ / 150 mm
  • special sizes: polished only diameters up to 300 mm
  • specifications: according to SEMI-Standard
  • tolerance (diameter): +/- 0.3 mm

Squared Substrates:

  • standard sizes: 50 x 50 mm², 100 x 100 mm², 125 x 125 mm², 150 x 150 mm²
  • tolerance (edge): +/- 0.3 mm

Invenios produces wafers and squared substrates in thicknesses from 0.15 mm up to 2.5 mm. Depending on the type of glass and the dimensions of the substrate we can also deliver thinner or thicker substrates.

Tolerances:

  • Wafers: 3″ – 5″: +/- 0.015 mm, 6″: +/- 0.02 mm
  • Squared Substrates: +/- 0.015 mm
  • Surfaces: polished surface rA ~ 0,02 µm, ground surface rA ~ 0,60 µm

Cleaning and Packing:

  • cleaning is done in an ultra-sonic basin with isopropanol or aceton
  • packing in dust-reduced environment
  • products will be sealed in plastic on demand

Qualities:

  • A quality: no defects > 50 µm / no bubbles
  • B quality: maximum of 2 bubbles, bubble size: 50 µm – 1 mm / 100 cm² and maximum of 1 edge defect, defect size: 1 mm / 40 cm and maximum of 2 scratches, scratch size: 50 µm – 20 mm
  • C quality: No. of defects and/or size > B quality

Use our competence to reach your targets ! Invenios possesses extensive know-how on the micro-structurization of glass, ceramic and silicon. On the basis of many years of development and production of microtechnological products, the enterprise was able to optimize the structurization process, which is used for fabrication of its products, to a maximum. Therefore we generally recommend to execute these processes at Invenios. Use our competence to reach your targets ! If you should still decide to execute the structurization yourself, we have to point out, that Invenios is not taking any liability due to possible damages caused on direct or indirect correlation of glasses sold by the company.