The micro-electro-mechanical systems (MEMS) and devices comprising fluid flow can be called microfluidic devices and systems. Microfluidic devices are attractive because of the minimal volume of fluids that are used in these systems and lower concentration of molecules required for a chemical reaction or detection process. As part of our ability to build micro scale 3D structures on variety of substrates we have made and continue to build microfluidics structures such as:

  • microchannels and pipes
  • microjets
  • microfluidic chips (lab-on-a-chip)
  • microfluidic circuits