Micromachining of Photostructurable Glass-Ceramics
Invenios has built a state-of-the-art laser machining foundry dedicated to true microfabrication of glass-ceramic structures. The technology can be applied to square or rectangular substrates ranging in size from 100 mm square to 150 mm square and ranging in thickness from 0.2 mm to 11 mm. Titer-plates made of glass or glass ceramics have distinct advantages compared to titer-plates made of plastic.
The technology leverages the unique properties of the photo-structurable, aluminosilicate glass-ceramic substrate material. Most of the advantages are due to the unique properties of glass:
- can be cleaned and sterilized
- optical transparency
- low self-fluorescence
- chemically stable
- high electrical isolation
- temperature resistance up to 400 °C
Hole plates made of photoetchable glass are generated by applying the structurization process well-known in the semiconductor technology. The hole plate is connected to a ground plate which is made of suitable glass materials meeting the various application needs. Additionally we offer further processing or different coatings.
- well design: round or rectangular in various designs
- well volume: 0.1 nl – 100 µl
- hole plate: opaque glass ceramics or transparent
- ground plate: quartz glass, microscope slides, B270, etc.
- plate thickness: 0.3 – 3.5 mm
- No. of wells: up to 500 wells per mm²
- No. of wells: 96, 384 or 1536 wells
- plate size: 127.76 x 85.47 mm² according to the standard of SBS
- tolerance: ± 0.1 mm
- well volume: 30, 10 or 5 µl
- depth of well: approximately 2.5 mm