System Components

Invenios produces a broad line of specialized precision positioning systems that help system integrators drive production throughput at unprecedented yields. Unlike most nanopositioner manufacturers that sacrifice stiffness for resolution, the Invenios suite of high-stiffness precision linear and rotary stages, and anthropomorphic platforms eliminate redundant process steps and deliver a measurably higher production yield in a wide range of sub-micron alignment and assembly applications.

Positioning Components

Travel, mm 30, 100, 150
Resolution, nm 33 (Nano) 01 (Nano-XP)
Load, N 20
Speed, mm/sec 25
Flatness, µm ±0.5
InvenioStage-Nano, -NanoXP (30, 100, 150mm) Precision Ball Screw Series InvenioStage-Nano and InvenioStage-NanoXP of scalable precision ball-screw stages meet demanding positioning requirements in applications employing short (30mm) to medium (150mm) travel.The Nano series employs patented bearing technology that achieves sub-micron out-of-plane motion required in the most demanding applications and delivers on-axis resolution of 30 nm. The InvenioStage-NanoXP option employs a precision scale that measures directly the stage translation enabling 1nm resolution.
Travel, µm 25 – 500
Resolution 12 or 16bit of full travel
Load, N 3.3
Axes 1, 2
Speed, mm/sec 375
Feedback Eddy Current
InvenioFlex X-Y(25-500 micron), Rotary 1-25 DegreesInvenioFlex-Series of dual-axis, piezo-driven flexures achieves extended range of motion-scalable from 25 to 500 µm with 16 bit dynamic range in an industrially-hardened package.
Travel, mm 10
Flatness 10 nm over 10mm
Load, N 1 N
Axes 1
Max Speed, mm/sec 1
Min Speed, µm/sec 3
InvenioRef InvenioRef-Series of reference stages achieves a flatness of motion of 10nm over 10 mm, meeting the needs of atomic force microscopes and positioning systems that require extended range of motion with tight out-of-plane error tolerances.

Assembly Platforms

Linear Travel, mm ±15 mm in x-y (plane parallel to base plane. +10/–13 in
z
Angular Travel, degrees ±15 in tip/tilt (rx, ry) ± 10 rz
Resolution, nm/ µrad 33/0.235
Load, kg 4 centered on origin (x=0, y=0), 1 @ 150 mm offset from
z-axis
Axes 6
Linear Speed, mm/sec 25 in x-y, 17 in z
Angular Speed, rad/sec 0.17
Linear
Flatness
±1 µm
Angular Flatness ±0.5 µrad
Mounting Vertical, Inverted, Side
InvenioSix InvenioSix is a six degree-of-freedom anthropomorphic robot that delivers sub-micron repeatability (100 nm/2 µrad) with extended range of motion (50 µm/ +/-100 µrad) meeting the needs of precision alignment applications commonly found in the telecommunications and consumer electronics arenas.
Travel, mm 30, 100, 150
Resolution, nm 33 (Nano)01 (Nano-XP)
Load, N 20
Speed, mm/sec 25
Flatness, µm ±0.5
InvenioStage-based Cartesian NanopositionerInvenios’ Cartesian Platforms integrate multiple InvenioStage-Nano, InvenioStage-LC, and InvenioLinear components to deliver high-performance in a space-efficient footprint. Typical configurations include XY, YZ, and XYZ topologies.
See InvenioStage and InvenioFlex specifications to determine the performance of your built-to-order configuration. Industrially-Hardened Hybrid Platforms-InvenioStage/InvenioFlex Invenios’ Cartesian Platforms with Integrated InvenioFlex integrate precision InvenioFlex technology with InvenioStage and InvenioLinear stages to achieve high-bandwidth nanoscale resolution with extended range of motion-all in the world’s smallest footprint. Typical configurations include Z-xy, XYZ-xy, (Z-xy)-xy-(Z-xy)T.

Positioning Components

Travel, mm 30, 100, 150
Resolution, nm 33 (Nano) 01 (Nano-XP)
Load, N 20
Speed, mm/sec 25
Flatness, µm ± 0.5
   
   
InvenioStage-Nano, -NanoXP (30, 100, 150mm) Precision Ball Screw Series InvenioStage-Nano and InvenioStage-NanoXP of scalable precision ball-screw stages meet demanding positioning requirements in applications employing short (30mm) to medium (150mm) travel. The Nano series employs patented bearing technology that achieves sub-micron out-of-plane motion required in the most demanding applications and delivers on-axis resolution of 30 nm. The InvenioStage-NanoXP option employs a precision scale that measures directly the stage translation enabling 1nm resolution.